Analysis and Metrology
Optical profilometer Sensofar S-Neox
This optical profilometer is a precision measurement tool that utilizes various objectives with different magnifications to obtain detailed surface topography of samples. It employs multiple techniques to capture high-resolution 2D and 3D images, enabling comprehensive analysis of surface features, flatness and surface texture as well as layer thickness.
Techniques
Confocal, Interferometry, Active Illumination Focus Variation and Spectroscopic Reflectometry
Objectives
EPI 5x, EPI 10x, EPI 20x, EPI 100x, TI 5x, DI 20
Sample size
200mm
Mechanical profilometer KLA P-7
The KLA P-7 mechanical profilometer is an advanced device designed for high-precision surface measurement and characterization. It utilizes a stylus that moves across the sample surface to measure surface roughness and topography, capturing detailed profiles of various materials. Additionally, it features a 3D mode for comprehensive surface analysis and a stress mode to evaluate residual stresses, making it a very versatile tool.
Modes
2D, 3D, 2D Stress
Sample size
Up to 200mm
AFM Veeco Dimension 3100
This Atomic Force Microscope is a high-resolution imaging tool used to characterize the surface topography and properties of materials at the nanoscale. It operates by scanning a sharp tip attached to a cantilever across the sample surface, where interactions between the tip and the sample generate detailed topographical maps.
Modes
Tapping, Contact
Sample size
Up to 150mm
SEM FEI InspectF
This Scanning Electron Microscope (SEM) uses a focused beam of electrons to produce detailed images of a sample by scanning its surface. This interaction generates signals that provide information about the sample’s topography and composition. This system includes Energy-dispersive X-ray spectroscopy (EDX) for elemental chemical analysis.
Acceleration voltage
1 to 30kV
Detectors
SE, BSE
Resolution
1.2 nm at 30kV
EDX resolution
<133eV
Sample size
Up to 50mm
Ellipsometer SOPRA GES-5E
This ellipsometer is an optical instrument that measures the thickness and optical properties of thin films by analyzing changes in light polarization upon reflection from a sample surface. It provides precise data on film thickness, refractive index, and absorption, making it valuable in materials science for non-destructive characterizatio
Spectral range
190-200mm
Sample size
Up to 200mm
Optical microscopes Olympus BX51
These optical microscopes are devices that use visible light and lenses to magnify, visualize and capture images of small objects or details not visible to the naked eye.
Objective
5x, 10x, 20x, 50x, 100x